JPH037951Y2 - - Google Patents
Info
- Publication number
- JPH037951Y2 JPH037951Y2 JP15745384U JP15745384U JPH037951Y2 JP H037951 Y2 JPH037951 Y2 JP H037951Y2 JP 15745384 U JP15745384 U JP 15745384U JP 15745384 U JP15745384 U JP 15745384U JP H037951 Y2 JPH037951 Y2 JP H037951Y2
- Authority
- JP
- Japan
- Prior art keywords
- dioxide layer
- silicon dioxide
- silicon
- layer
- rich
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 52
- 235000012239 silicon dioxide Nutrition 0.000 claims description 26
- 239000000377 silicon dioxide Substances 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 16
- 239000000523 sample Substances 0.000 description 10
- 238000010894 electron beam technology Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- -1 silicon ions Chemical class 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011838 internal investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745384U JPH037951Y2 (en]) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745384U JPH037951Y2 (en]) | 1984-10-18 | 1984-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6172850U JPS6172850U (en]) | 1986-05-17 |
| JPH037951Y2 true JPH037951Y2 (en]) | 1991-02-27 |
Family
ID=30715446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15745384U Expired JPH037951Y2 (en]) | 1984-10-18 | 1984-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037951Y2 (en]) |
-
1984
- 1984-10-18 JP JP15745384U patent/JPH037951Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6172850U (en]) | 1986-05-17 |
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